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High-Performance Ingaas Hemts on Gaas Substrate Using Alas/Gaas Superlattice Buffer-Assisted Heterostructure Growth

Jaeyong Jeong,Jongmin Kim,Sanghyeon Kim

Journal of Alloys and Compounds(2025)

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关键词
metal-organic chemical vapor deposition,InGaAs,Superlattice buffer,HEMT,GaAs substrate
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