Scalable Silicon Nitride Planar Guided Mode Resonators for Enhanced Raman Spectroscopy
2024 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)（2024）
关键词
Raman Spectroscopy,Resonant Modes,Silicon Nitride,Raman Signal,Quartz Substrate,Waveguide,Grating,Plasma-enhanced Chemical Vapor Deposition,Raman Enhancement
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