Influence of the Edge Effect of the Solenoid Magnetic Field on the Discharge Process of Magnetron Sputtering in Long and Narrow Chambers
JOURNAL OF INSTRUMENTATION（2024）
Key words
Instrumentation for particle accelerators and storage rings - high energy (linear accelerators, synchrotrons),Instrumentation for synchrotron radiation accelerators,Nuclear instruments and methods for hot plasma diagnostics,Plasma generation (laser-produced, RF, x ray-produced)
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