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The Electrochemical Profiling of N+/n GaAs Structures for Field-Effect Transistors

D. Yu. Protasov, P. P. Kamesh,K. A. Svit,D. V. Dmitriev, A. A. Makeeva, E. M. Rzaev,K. S. Zhuravlev

Semiconductors（2024）

Cited 0|Views3
Key words
elecrochemical profiling,n +/n GaAs,etching defects,concentration profile distortions
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