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Suspended Tip Overhanging from Chip Edge for Atomic Force Microscopy with an Optomechanical Resonator

Aleksandra Markovic, Mathis Lefebvre,Laurent Mazenq,Samuel Charlot,Marc Gely,Aurelie Lecestre,Mathieu Arribat,Guillaume Jourdan,Bernard Legrand

JOURNAL OF OPTICAL MICROSYSTEMS（2024）

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关键词
atomic force microscopy,cavity optomechanics,microfabrication,plasma etching,saw dicing,suspended tip
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