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Plasma Enhanced Atomic Layer Deposition of InP Layers and Multilayer InP/GaP Structures on Si Substrate

A. S. Gudovskikh,A. V. Uvarov,A. I. Baranov,E. A. Vyacheslavova,A. A. Maksimova,D. A. Kirilenko

Semiconductors（2024）

Cited 0|Views1
Key words
GaP,InP,atomic layer deposition,heterostructures,photoconductivity
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