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High-yield Large-Scale Suspended Graphene Membranes over Closed Cavities for Sensor Applications

Sebastian Lukas,Ardeshir Esteki,Nico Rademacher, Vikas Jangra, Michael Gross,Zhenxing Wang,Ha-Duong Ngo,Manuel Baeuscher,Piotr Mackowiak, Katrin Hoeppner,Dominique J. Wehenkel,Richard van Rijn,Max C. Lemme

ACS Nano（2024）

Cited 1|Views6
Key words
graphene,membrane,MEMS,pressuresensor,2D materials
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