Wafer-scale Nanofabrication of Sub-5 Nm Gaps in Plasmonic MetasurfacesJeetendra Gour,Sebastian Beer,Pallabi Paul,Alessandro Alberucci,Michael Steinert,Adriana Szeghalmi,Thomas Siefke,Ulf Peschel,Stefan Nolte,Uwe Detlef ZeitnerNanophotonics（2024）引用 0|浏览5关键词plasmonics,nanogap,ALD,nanotechnology,nanogap metasurfaces,sub-5 nmAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
