SOI Lateral Hall Device with Deep Trench Fingers for High Sensitivity and Low Offset

Guiqiang Zheng,Jie Ma, Yichen Li, Nannan Cheng, Qingyin Zhong,Lanlan Yang,Nailong He,Dejin Wang,Sen Zhang,Yongjia Li,Long Zhang,Siyang Liu,Weifeng Sun

IEEE ELECTRON DEVICE LETTERS（2024）

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关键词

Electrodes,Magnetic field measurement,Silicon-on-insulator,Current measurement,Temperature measurement,Magnetic fields,Fingers,Hall sensor,lateral hall devices (LHD),silicon on insulator (SOI),bipolar-CMOS-DMOS (BCD),deep trench,short-circuit effect

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