P-type SnO Semiconductor Transistor and Application

C. C. Wang, C. C. Kuo,C. H. Wu, A. Lu,H. Y. Lee, C. F. Hsu,P. J. Tzeng,T. Y. Lee,F. R. Hou, M. H. Chang, S. C. Lai, K. Goto,Shimeng Yu, C. I. Wu, C. T. Lin, Y. M. Lin,X. Y. Bao

Symposium on VLSI Technology（2024）

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Key words

P-type SnO,Carrier Mobility,Chip Area,Short Channel,P-type Materials,3D Integration,Back-end-of-line,Contact Resistance,Channel Length,Schottky Barrier,Gate Dielectric

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