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Microstructure Control and Mechanical Properties of Ultra-nanocrystalline Diamond Films

Juping Tu,Yun Zhao,Siyi Chan,Yuting Zheng,Liangxian Chen,Junjun Wei,Jinlong Liu,Chengming Li

Ceramics International（2024）

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Key words
Ultra-nanocrystalline diamond,Mechanical properties,Nitrogen-interstitial atom defects,Effective nitrogen atom concentration
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