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Change in the InSb Nanocrystal Growth Direction at the Si/SiO2 Interface During Ion-Beam Synthesis

Ida Tyschenko,Anton Gutakovskii, Ruonan Zhang,Vladimir Vdovin,Vladimir Volodin,Vladimir Popov

MATERIALS LETTERS（2024）

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Key words
Nanocrystals,Ion implantation,InSb,Si/SiO 2 interface,Silicon-on-insulator
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