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Enhanced Polarization, Endurance, and Long Retention in Low Temperature Processed W/Hf0.5Zr0.5O2/W Ferroelectric Capacitor for Back-End-of-Line Integration

Md Hanif Ali,Adityanarayan Pandey, Soham Shirodkar,Rowtu Srinu,Paritosh Meihar,Udayan Ganguly,Veeresh Deshpande

8TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM 2024（2024）

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Key words
Low thermal budget,Annealing time,Remnant polarization,Endurance,Retention
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