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DMWMNet: A Novel Dual-Branch Multi-Level Convolutional Network for High-Performance Mixed-Type Wafer Map Defect Detection in Semiconductor Manufacturing

Xiangyan Zhang,Zhong Jiang, Hong Yang, Yadong Mo, Linkun Zhou,Ying Zhang,Jian Li,Shimin Wei

COMPUTERS IN INDUSTRY(2024)

Cited 1|Views10
Key words
Mixed-type wafer map,Basic defect discrimination,Defect number detection,Focal loss,CBAM,PeleeNet
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