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Unraveling the Connection Between Deposition, Microstructure, and Performance of Superconducting Quantum Circuits Using Multi-modal Electron Microscopy

Jin-Su Oh,Cameron J Kopas,Jayss Marshall,Xiaotian Fang,Kamal R Joshi,Amlan Datta,Sunil Ghimire,Joong-Mok Park,Richard Kim, Daniel Setiawan,Ella Lachman,Joshua Y Mutus,Akshay A Murthy,Anna Grassellino,Alex Romanenko,John Zasadzinski,Jigang Wang,Ruslan Prozorov,Kameshwar Yadavalli,Matt Kramer, Lin Zhou

Microscopy and Microanalysis（2024）

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