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Electrostatic Force-Assisted Transfer of Flexible Silicon Photodetector Focal Plane Arrays for Image Sensors.

Yuting Ye, Qingyan Deng,Jianghong Wu,Chuyu Zhong,Hui Ma,Yilin Shi,Dingwei Li,Renjie Tang,Yiheng Tang,Jialing Jian,Bowen Zhu,Hongtao Lin,Lan Li

ACS Applied Materials & Interfaces（2024）

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Key words
si photodiode,flexiblephotodetector array,electrostatic force-assisted transfer,pi awareness,image sensor
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