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Spatial Correlation of Defect-Selective Etching and Dark Luminescence Spots in Al X Ga1-x N

Carsten Netzel,Sylvia Hagedorn, Matthias Schoen,Arne Knauer,Frank Brunner,Markus Weyers

SEMICONDUCTOR SCIENCE AND TECHNOLOGY（2024）

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Key words
threading dislocations,AlGaN,defect-selective etching,dark spots,cathodoluminescence,etch pits
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