An Angular Spectrum Approach to Inverse Synthesis for the Characterization of Optical and Geometrical Properties of Semiconductor Thin Films
arxiv(2024)
Abstract
To design semiconductor-based optical devices, the optical properties of the
used semiconductor materials must be precisely measured over a large band.
Transmission spectroscopy stands out as an inexpensive and widely available
method for this measurement but requires model assumptions and reconstruction
algorithms to convert the measured transmittance spectra into optical
properties of the thin films. Amongst the different reconstruction techniques,
inverse synthesis methods generally provide high precision but rely on rigid
analytical models of a thin film system. In this paper, we demonstrate a novel
flexible inverse synthesis method that uses angular spectrum wave propagation
and does not rely on rigid model assumptions. Amongst other evaluated
parameters, our algorithm is capable of evaluating the geometrical properties
of thin film surfaces, which reduces the variance caused by inverse synthesis
optimization routines and significantly improves measurement precision. The
proposed method could potentially allow for the characterization of "uncommon"
thin film samples that do not fit the current model assumptions, as well as the
characterization of samples with higher complexity, e.g., multi-layer systems.
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