Preparation and Deep-Uv Solar-Blind Photovoltaic Performance of AlYN-based MSM Detector
IEEE Sensors Journal（2024）
Key words
Films,III-V semiconductor materials,Aluminum nitride,Sputtering,Crystals,Photonic band gap,Doping,AlYN film,band gap,dual-target co-sputtering,photo-to-dark current ratio (PDCR),responsivity
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