Preparation of Sol-Gel Random Micro Lens Array
arxiv(2024)
摘要
The structure of random micro lens array (rMLA) breaks the periodicity of
micro lens array (MLA), suppressing coherence in the homogenization process,
thereby achieving better spot homogenization effects. Sol-gel rMLA exhibits
strong adaptability and high laser tolerance, making it valuable for laser beam
control applications. However, the cracking tendency during the drying process
of sol-gel is a challenge. This paper successfully prepares sol-gel random
micro lens arrays through nanoimprint lithography, thoroughly analyzing the
cracking mechanism and resolving the cracking issue during the drying process
of sol-gel. The manufactured sol-gel random micro lenses exhibit good surface
profile accuracy, uniformity, and excellent light source shaping effects. The
energy utilization efficiency of various types of rMLA is approximately 90
with rectangular and hexagonal rMLAs achieving uniformity of light spots of
over 80
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