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Design and Fabrication of 2.5D Cryogenic Interposer with Integrated Superconducting TSVs and Resonators

PROCEEDINGS OF THE IEEE 74TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE, ECTC 2024(2024)

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Key words
2.5D cryogenic interposer,Tc of the interposer,Transmission at cryogenic temperature,resonators
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