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Study of Etching Features of Quartz Glass Irradiated with Xenon Ions

P. Yu. Apel,M. M. Chernyavsky,A. A. Gippius,G. V. Kalinina,N. S. Konovalova,N. M. Okateva,N. G. Polukhina,Zh. T. Sadykov,T. V. Shchedrina,N. I. Starkov,E. N. Starkova,I. I. Zasavitskii

Bulletin of the Lebedev Physics Institute（2024）

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Key words
optical quartz glass,heavy ion detection conditions,etching regimes
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