Achieving Sub-5 Mhz Frequency Split Trimming of Micro Hemispherical Resonator Gyroscope with Method of Mass-stiffness Decoupling
IEEE SENSORS JOURNAL（2024）
Key words
Decoupling,femtosecond laser trimming,frequency split,mass-stiffness coupling,micro hemispherical resonator gyroscope (mHRG)
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