Optimizing SiGe–SiO2 Visible–Short‐Wave Infrared Photoresponse by Modulating Interplay Between Strain and Defects Through Annealing
Advanced Photonics Research(2024)
Key words
magnetron sputtering,photocurrents,rapid-like furnace annealing,SiGe nanocrystals,stress field and defects,structure and morphologies
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