Template-assisted Growth of Ga-based Nanoparticle Clusters on Si: Effect of Post-Annealing Process on the Ga Ion Beam Exposed 2D Arrays Fabricated by Focused Ion Beam Nanolithography

Hrudya Radhakrishnan, Rajagopal Rangarajan,Ramanathaswamy Pandian,Sandip Kumar Dhara

NANOTECHNOLOGY（2024）

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Key words

focused ion beam,nanolithography,template-assisted growth,gallium-based nanoparticles

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