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Membrane InGaAsP-bulk Photodetector Using Franz-Keldysh Effect for Wide Bandwidth and High Responsivity

Takuma Aihara,Tatsurou Hiraki,Yoshiho Maeda,Koji Takeda,Takuro Fujii, Sigeru Kanazawa,Toru Segawa,Shinji Matsuo

2024 IEEE Silicon Photonics Conference (SiPhotonics)（2024）

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Abstract
We demonstrate an over-67-GHz-bandwidth O-band membrane photodetector (PD) with an InGaAsP-bulk core on a Si photonics platform. The membrane PD has a fiber-to-PD responsivity of 0.6 A/W. Clear eye opening is achieved for 100-Gbit/s non-return-to-zero signal.
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Key words
Heterogeneous integration,photodetector
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