Sputtering yields of TiC and MAX phase Ti2AlC using Ne, Ar, Xe ions
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2024）
Abstract
Information on sputtering coefficients of materials is necessary for coating deposition technologies and studying the interaction of ion beams and plasma with the surface. This paper summarizes experimental data on sputtering coefficients of TiC and MAX phase Ti2AlC by noble gas ions Ne, Ar, and Xe. The sputtering coefficients of TiC and MAX phase Ti2AlC were calculated using a semi-empirical model. A comparison of the experimental and calculated data showed satisfactory agreement.
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Key words
Sputtering yield,Sputtering threshold energy,Compounds solid targets,Ion,Noble gas
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