Characterization of an RF-excited Broad Beam Ion Source Operated with a Mixture of CHF3 and O2Erik Rohkamm,Daniel Spemann,Frank Scholze,Frank FrostJOURNAL OF APPLIED PHYSICS（2024）引用 3|浏览3AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
