谷歌浏览器插件
订阅小程序
在清言上使用
VIPCreated with Sketch.

Effect of Stress Control by Growth Adjustment on the Edge Thread Dislocation Density of AlN Grown on the Sapphire

Yuheng Zhang,Jing Yang, Feng Liang,Zongshun Liu,Yufei Hou,Bing Liu,Fu Zheng, Xuefeng Liu,Degang Zhao

SEMICONDUCTOR SCIENCE AND TECHNOLOGY（2024）

引用 1|浏览7
关键词
AlN,growth stress,edge dislocation,mechanical calculations
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要