Sensitivity enhancement using triple metal gate work function engineering of junctionless cylindrical gate all around SiNW MOSFET based biosensor for neutral biomolecule species detection for upcoming sub 14 nm technology node

In the present work Dielectric Modulation (DM) technique along with Triple Metal (TM) gate engineering has been used for the junctionless (JL) cylindrical gate all around (CGAA) Si nanowire (NW) MOSFET based biosensor for label free electrical detection of neutral biomolecules species like Uricase, Streptavidin, Protein, Biotin, ChOx (choline oxidase), and APTES etc. For this device, the Drift Diffusion approach has been used along with self-consistent solution of Schrodinger’s equation with Poisson’s equation. For the biomolecule immobilization, a nanogap cavity region is formed in the JL SiNW MOSFET by etching gate oxide layer above the SiO2 interfacial layer. The change in the drain current (ID), threshold voltage (Vth), off-current sensitivity (SIoff), threshold voltage sensitivity (SVth) and Ion/Ioff current ratio of the device have been considered as the sensing parameters for detection of biomolecules under dry environment condition. In present work a new sensing metric of sensing of biomolecules – DIBL has been added which has never been reported in literature. In this work for JL SiNW, sensitivity metrics like smaller DIBL ∼50.47 mV/V, higher SIoff9.33×105, higher SVth28.72, nearly ideal subthreshold slope (SS) ∼60 mV/dec, and higher Ion/Ioff current ratio ∼9.01 × 1012 have been obtained in comparison to available literature results.