V-Ramp VBD Prediction Method Using OCD-Spectrum and Deep-Learning, and Application to Early Detection of V-NAND Low Metal Reliability Risk.

SungMan Rhee, Sung-Pyo Park,Sangku Park,Yuchul Hwang, Sangwoo Pae, Jun Meng, Yoonju Park

IEEE International Reliability Physics Symposium(2024)

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