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Influence of the Tilted IDT on Nonlinear Harmonic Signals in SAW Resonators on LiNbO3/SiO2/Si Structure

Guangyao Lv,Baichuan Li,Qiaozhen Zhang,Shuxian Wu,Feihong Bao,Sulei Fu,Weibiao Wang

2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)（2024）

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