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Electronic stopping cross section for He in Ru, derived from RBS spectra

Johan Meersschaut, Simon Meersschaut,Jean-Philippe Soulié, René Heller

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2024）

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Abstract
We report electronic stopping cross section measurements for 4He in Ru. For this, 120 nm Ru is deposited on a silicon substrate, and the stopping cross section is obtained from the analysis of Rutherford backscattering (RBS) spectra. The results are compared with SRIM-2010 predictions, and a new parametrization for the energy dependence of the stopping cross section is proposed.
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Stopping cross section,Rutherford backscattering Spectrometry
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