Performance Enhancement of Microwave Discharge Cathode by External Gas Injection System

The effect of external gas injection near the plume on the performance of a microwave discharge cathode is investigated. Experiments were conducted under two gas injection conditions: gas addition and gas distribution. Gas distribution tended to lead to better performance than gas addition. In the gas distribution experiments, the total gas consumption was kept constant, the internal gas flow rate was reduced, and external gas was supplied. The electron current increased from 0.26 to 0.49 A at 35 V when the microwave power was 15 W. When the sum of the internal and external gas flow rates was held constant, external gas injection lowered the neutralization costs and increased the gas utilization efficiency. The neutralization current was successfully increased by 48 % at 12 W of microwave power compared with 8 W of microwave power with the same level of naturalization cost and gas utilization efficiency. The electron temperature and plasma density in the plume, as measured using a Langmuir probe, suggested that an increase of ionization in the plume by the external gas injection enhanced the cathode's performance.