Inflection Points in Cfet Scaling: Impact of Dtco Boosters

Complimentary FETs (CFETs) enable aggressive standard cell height (CH) reduction, facilitating on-target area scaling without shrinking contacted gate pitch (CGP). We extensively benchmark nanosheet (NS) based CFETs against gate-all-around (GAA) NSFETs using power, performance, area (PPA) as well as scalability metrics. The impact of BEoL RC, new materials, DTCO boosters is further explored. 4T CFET designed with 20 nm metal pitch (MP) offers 62% smaller area and 28% extra speed at iso-power over reference NS devices.