Ultrathin TIO2 Channel HfLaO FeFET with Low Operation Voltage

Xujin Song, Dijiang Sun,Chenxi Yu, Shangze Li,Zheng Zhou,Xiaoyan Liu,Jinfeng Kang

CONFERENCE OF SCIENCE & TECHNOLOGY FOR INTEGRATED CIRCUITS, 2024 CSTIC（2024）

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关键词

Low Voltage,Low-voltage Operation,Ferroelectric Field-effect Transistor,Ultrathin Channel,Ultrathin TiO2,Field-effect Transistors,Atomic Layer Deposition,Channel Layer,TiO2 Layer,Remnant Polarization,Memory Window,Ferroelectric Layer,X-ray Photoelectron Spectroscopy,Electrical Measurements,Cross-sectional Transmission Electron Microscopy,Grazing Incidence X-ray Diffraction,Rapid Thermal Annealing,Atomic Layer Deposition Process,3D Integration

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