基于量热法的高功率激光功率测试技术
Journal of Applied Optics(2024)
Abstract
针对高功率激光功率的测试,尤其是高功率激光器烤机时的长时间测量需求,设计了基于水冷却的激光功率测量方法.利用热敏电阻测量冷却水进水口和出水口的温差计算激光功率.利用有限元仿真软件建立了吸收腔热路结构的三维有限元模型,并对不同口径的冷却水路进行模拟仿真.测试结果表明,用该方法测试高功率激光功率,测量相对误差可以保证在1.6%以内.
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Key words
optical metrology,high power laser,calorimetric method,long-time measurement
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