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A Review of Ultrafast Laser Micro/nano Fabrication: Material Processing, Surface/interface Controlling, and Devices Fabrication

Heng Guo,Jiawang Xie,Guangzhi He,Dezhi Zhu,Ming Qiao,Jianfeng Yan,Jiachen Yu,Jiaqun Li,Yuzhi Zhao,Ma Luo, Haoze Han

Nano Research（2024）

Cited 5|Views25
Key words
ultrafast laser,micro/nano fabrication,material processing,surface/interface controlling,devices fabrication
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