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Benchmarking Diamond Surface Preparation and Fluorination Via Inductively Coupled Plasma-Reactive Ion Etching

Tia Gray,Xiang Zhang,Abhijit Biswas,Tanguy Terlier,Eliezer F. Oliveira,Anand B. Puthirath,Chenxi Li,Tymofii S. Pieshkov,Elias J. Garratt,Mahesh R. Neupane,Bradford B. Pate,A. Glen Birdwell,Tony G. Ivanov,Robert Vajtai,Pulickel M. Ajayan

CARBON（2024）

Cited 0|Views24
Key words
Diamond,Reactive ion etching,Fluorination,Surface morphology,Contact angle
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