Fabrication of EUV Gratings via Ion Irradiation

Johannes Kaufmann,Thomas Siefke, Carsten Ronning,Uwe Zeitner

High-Brightness Sources and Light-Driven Interactions Congress（2024）

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摘要

We fabricated shallow silicon gratings for EUV applications utilizing swelling upon irradiation with helium ions through polymer masks. Understanding the effects of fluence, flux and ion energy enables height control between 1 to 20 nm.

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