1 x 5 MEMS Mode Selective Switch with an Inverse-Designed Silicon Nitride MDM.

Julian L. Pita Ruiz,Almur A. S. Rabih,Seyedfakhreddin Nabavi,Frederic Nabki,Michaël Ménard

Optical Fiber Communications Conference and Exhibition（2024）

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摘要

We present the first experimental demonstration of an inverse-designed 5mode division multiplexer (MDM) in silicon nitride for MEMS-based inter-chip switches. The MDM exhibits high efficiency, wide bandwidth, compactness, robust fabrication, and compatibility with commercial foundry production.

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关键词

Silicon Nitride,Actuator,Lateral Displacement,Photonic Integrated Circuits,Average Transmission,Longitudinal Displacement,Communication Band,Input Waveguide

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