Latest Progress and Challenges in 300 mm Monolithic Silicon Photonics Manufacturing.

Takako Hirokawa,Yusheng Bian,Ken Giewont,Abdelsalam Aboketaf,Sujith Chandran, Jae Kyu Cho, Zahidur Chowdhury,Won Suk Lee,Qidi Liu, Prateek Sharma, Massimo Sorbara, Frederick G. Anderson, Farid Barakat, Arpan Dasgupta, Kevin Dezfulian,Thomas Houghton, Jason Kim, Yarong Lin,Norman Robson, Vaibhav Ruparelia, Shenghua Song, Ryan Sporer, Teck-Jung Tang, Janet Tinkler, Helen Wong,Michelle Zhang

Optical Fiber Communications Conference and Exhibition（2024）

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摘要

In this paper we discuss the latest developments in the GlobalFoundries Fotonix™ program, including enhancements in device performance, packaging, PDK compact models, and inhouse test capabilities.

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Silicon Photonics,Compact Model,High Power,Optical Power,Direct Coupling,Insertion Loss,Silicon Nitride,Mach-Zehnder Interferometer,System-level Analysis,Transimpedance Amplifier,Photonic Technologies,Waveguide Length,Variable Optical Attenuator,Μm Pitch

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