IR-Fourier Spectroscopy of Attenuated Total Internal Reflection of Polyimide Films on Single-Crystal Silicon Wafers

Attenuated total internal reflection (ATR) spectra of polyimide PI-2610 films deposited on single-crystal silicon wafers by centrifugation were studied after irradiation with 5-MeV electrons in a linear accelerator at doses of 1∙1014–2∙1015 cm–2. The strongest bands in the spectrum of the PI-2610 polyimide films were attributed to vibrations of the imide ring C–N–Cst (1349 cm–1) and aromatic ring (1517 cm–1), stretching vibrations of the imide ring C=Ostr (1700 cm–1) and CO–Cst-group C–C bonds (1074 cm-1), and bending vibrations of C–H bonds with maxima at 734 and 828 cm–1. The spectral shape and intensities of bands with maxima at 1700 and 1349 cm–1 due to C=O and C=N–Cstr vibrations were observed to change at an initial dose of 1∙1014 cm–2. It was assumed that this was due to relaxation of metastable states of these groups. The intensities of bands corresponding to asymmetric and symmetric stretching vibrations of C–H2 bonds decreased at a dose of 2∙1015 cm–2. The intensities of ATR bands due to vibrations of C=O and C–N bonds and aromatic and imide rings practically did not change.