Fabrication of a Moving-Coil-Type PDMS-Based Membrane Electromagnetic Micro-Actuator by Double-Sided Screen Printing Technology

This paper reports a moving-coil-type PDMS-based membrane electromagnetic micro-actuator. The Ag-based conductive polymer composite (CPC) is screen-printed to form a spiral coil onto a PDMS membrane, and the spiral coil is flexibly deformed with the membrane. The actuator generated static displacements of 0.711 mm and -0.785 mm at a DC voltage of ±15.1 V, respectively. At different sinusoidal voltage input with RMS value from 2.9 V to 15.1 V and the corresponding first mode frequency of around 51.5 Hz, asymmetrical displacements with a range of -0.41~0.5 mm were generated. The screen-printed coils of CPC can be easily fabricated on PDMS membranes, are flexible, and do not interfere with membrane deformation.