Experimental Study of the Origin of Nonlinear Damping in Very High Frequency Contour Mode Resonators
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)(2023)
摘要
This article investigates the sources of nonlinearities in aluminum nitride (AlN) contour mode resonators (CMRs) operating at very high frequencies (VHF) and having Q primarily limited by anchor losses. In this work, we demonstrate that the damped Duffing response observed in moderately-driven VHF CMRs is due to self-heating and geometric nonlinearities. 224-MHz CMRs of different anchor’s length (L
a
) and width (W
a
) are fabricated, tested, and modeled via a modified Butterworth-Van Dyke (mBVD) circuit that includes variable motional capacitance and resistance. The nonlinear elastic (α) and damping (β/α) coefficients resultant from fitting correlate with L
a
/W
a
(or thermal resistance), and L
a
(or nonlinear deformation), respectively. The latter is also proved via finite element analysis (FEA).
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关键词
Contour Mode Resonators,Nonlinear Damping,Van der Pol-Duffing,Geometric Nonlinearities
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