A 3D-printed Cantilever Beam Within a Semi-enclosed Cylinder Cavity For Differential Pressure Sensing
2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)(2024)
Abstract
In this study, a cantilever-based pressure sensor is fabricated that moves within a cylinder cavity by using a fused deposition modeling (FDM)-based three-dimensional (3D) printer. The semi-enclosed cylinder cavity frame is generated through layer-by-layer additive manufacturing to release the suspended cantilever structure by the FDM-type 3D printer. The displacement of the sensing membrane induced by the pressure difference on both sides of the membrane results in capacitance variations, which can be read out electrostatically. Furthermore, the results also highlight the simplicity and cost-effectiveness of the manufacturing process for this portable pressure sensor.
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Key words
3D-printing,Pressure sensor,Differential sensing,electrostatic
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