Cu_xAl_1-x films as Alternatives to Copper for Advanced Interconnect Metallization
arxiv(2024)
摘要
Cu_xAl_1-x thin films with 0.2 ≤ x ≤ 0.7 have been studied as
potential alternatives for the metallization of advanced interconnects.
First-principles simulations were used to obtain the Cu_xAl_1-x
electronic structure and cohesive energy to benchmark different intermetallics
and their prospects for interconnect metallization. Next, thin Cu_xAl_1-x
films were deposited by PVD with thicknesses in the range between 3 and 28 nm.
The lowest resistivities of 9.5 μΩcm were obtained for 28 nm thick
stochiometric CuAl and CuAl_2 after 400^∘C post-deposition annealing.
Based on the experimental results, we discuss the main challenges for the
studied aluminides from an interconnect point of view, namely the control of
the film stoichiometry, the phase separation observed for off-stoichiometric
CuAl and CuAl_2, as well as the presence of a nonstoichiometric surface
oxide.
更多查看译文
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要