Performance of Superconducting Resonators Suspended on SiN Membranes
arxiv(2024)
摘要
Correlated errors in superconducting circuits due to nonequilibrium
quasiparticles are a notable concern in efforts to achieve fault tolerant
quantum computing. The propagation of quasiparticles causing these correlated
errors can potentially be mediated by phonons in the substrate. Therefore,
methods that decouple devices from the substrate are possible solutions, such
as isolating devices atop SiN membranes. In this work, we validate the
compatibility of SiN membrane technology with high quality superconducting
circuits, adding the technique to the community's fabrication toolbox. We do so
by fabricating superconducting coplanar waveguide resonators entirely atop a
thin (∼110 nm) SiN layer, where the bulk Si originally supporting it has
been etched away, achieving a suspended membrane where the shortest length to
its thickness yields an aspect ratio of approximately 7.4 × 10^3. We
compare these membrane resonators to on-substrate resonators on the same chip,
finding similar internal quality factors ∼10^5 at single photon levels.
Furthermore, we confirm that these membranes do not adversely affect the
resonator thermalization rate. With these important benchmarks validated, this
technique can be extended to qubits.
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