Innovating Process in Heterojunction Back Contact Silicon Solar Cells Using Shadow Metal Masks
Transactions on Electrical and Electronic Materials(2024)
Abstract
We present a very simple process to fabricate silicon heterojunction back contact (HBC) solar cell. This process can easily form a backside structure using in situ masks without particular patterning process. Based on our silicon heterojunction (SHJ) solar cell process conditions, we optimize the process for HBC solar cell. The intrinsic a-Si: H layer and p-type a-Si: H layer process conditions were adjusted to improve to FF and efficiency. Applying these adjust, we obtained 18.1
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Key words
Heterojunction,Back contact,Fill factor,Carrier transport,Silicon solar cells
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