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Crystalline Si Surface Passivation with Nafion for Bulk Defects Detection with Electron Paramagnetic Resonance

Kejun Chen,Steve W. Johnston,P. Craig Taylor,David W. Mulder,Harvey L. Guthrey,William Nemeth,San Theingi,Matthew Page, Markus Kaupa,David L. Young,Sumit Agarwal,Paul Stradins

ACS APPLIED MATERIALS & INTERFACES（2024）

Cited 1|Views28
Key words
crystalline silicon,surface passivation,nafion,Al2O3 dielectric passivation,electron paramagnetic resonance,photoluminescence
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